Web19 feb. 2024 · In this paper, a lithography hotspot detection method based on transfer learning using pre-trained deep convolutional neural network is proposed. The proposed … WebHot Spot/ Critical Area is the region at the center of a random defect which will cause circuit failure (yield loss) By analyzing the critical areas, defect-limited yield can be estimated based on the probability of the failures of vias and point defects on routing The larger the defect size, the larger the Critical Area
Model-based hints for litho-hotspots repair Semantic Scholar
WebIn the to use 193nm lithography to print 32nm features, heavily construct-by-correction paradigm, the design is first routed as relying on resolution enhancement techniques (RET) such as usual, then the litho-hotspots are detected (e.g., by some rules optical proximity correction (OPC), immersion lithography, of thumbs or lithography simulations/models) … WebThe litho-metric plays a key role for a router to be aware of the potential hotspots. It shall have the following properties: (a) The post-OPC silicon image should be targeted, as … ruby metrology quick check
Model-based hints for litho-hotspots repair - SPIE Digital Library
Web11328 03 Machine Learning using retarget data to improve accuracy of fast lithographic hotspot detection [11328 -2] 11328 05 Implementing Machine Le ar ning OPC on … WebHowever, pattern matching techniques require a library of accumulated known litho hotspots in allowed accuracy rate. In this paper, we present a fast and accurate litho hotspot detection methodology using specialized machine learning. We built a deep neural network with training from real hotspot candidates. WebLitho hotspots fixing using model based algorithm. As technology advances, IC designs are getting more sophisticated, thus it becomes more critical and challenging to fix … scanned pdf text editor online